High precision and efficiency
-Compatible with sub-micron resolution high precision and large-scale high-efficiency processing
Optical field transformation
- Realization of laser beam spatiotemporal shaping using liquid crystal spatial light modulator
Dual-mode compatible
- Dual working modes of objective lens focusing and galvanometer scanning
Precise movement
- Precise motion positioning platform with accessible nanometer resolution
Precise control
- Spacetime efficient and accurate control with laser pulse and motion localization
Human-machine friendly
- Autonomous development of a comprehensive integrated control and process planning software